Detailed Course Information |
Fall 2024
Sep 19, 2024 |
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| CHBE 6229 - Intro to MEMS |
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Introduction to Micro-Electro-Mechanical Systems: Microfabrication techniques including: photolithography, etching, physical and chemical vapor deposition, electroplating, bonding and polymer processing. Application to sensors and actuators.
0.000 OR 3.000 Credit hours 0.000 OR 2.000 Lecture hours 0.000 OR 3.000 Lab hours Grade Basis: ALP All Sections for this Course Sch/Chemical&Biomolecular Engr Department Restrictions: Must be enrolled in one of the following Campuses: Georgia Tech-Atlanta * |
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