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ECE 6229 - Introduction to MEMS |
Introduction to Micro-Electro-Mechanical systems: Microfabrication techniques including: photolithography, etching, physical and chemical vapor deposition, electroplating, bonding and polymer processing. Application to sensors and actuators. Credit not allowed for both ECE 6229 and ME 6229 or CHBE 6229.
0.000 OR 3.000 Credit hours 0.000 OR 2.000 Lecture hours 0.000 OR 3.000 Lab hours Grade Basis: ALP All Sections for this Course Sch/Electrical & Computer Engr Department Restrictions: May not be enrolled in one of the following Levels: Undergraduate Semester Must be enrolled in one of the following Campuses: Georgia Tech-Atlanta * |
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