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ME 6229 - Introduction to MEMS |
Principles of microfabrication for sensors and actuators. Lumped parameter analysis and computer-aided design; materials properties; case studies include cantilever beam, pressure sensor, and accelerometer.
0.000 OR 3.000 Credit hours 0.000 OR 2.000 Lecture hours 0.000 OR 3.000 Lab hours Grade Basis: ALP All Sections for this Course Sch/Mechanical Engineering Department Restrictions: May not be enrolled in one of the following Levels: Undergraduate Semester Must be enrolled in one of the following Campuses: Georgia Tech-Atlanta * |
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