Detailed Course Information |
Fall 2024
Jan 18, 2025 |
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| CHBE 6608 - Microlithography |
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The study of fundamental issues from physics, chemistry, chemical engineering, and electrical engineering inherent in semiconductor microlithography, encompassing both materials and processes used for pattern definition.
3.000 Credit hours 3.000 Lecture hours Grade Basis: ALP Sch/Chemical&Biomolecular Engr Department Restrictions: May not be enrolled in one of the following Levels: Undergraduate Semester Must be enrolled in one of the following Campuses: Georgia Tech-Atlanta * |
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