Detailed Course Information |
Fall 2024
Jan 18, 2025 |
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| CHBE 6759 - Plasma Processing |
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Fundamental physics, chemistry, chemical engineering, and electrical engineering principles inherent in plasma processes. Includes etching, deposition, diagnostic methods, and control schemes. Crosslisted with ECE 6759.
3.000 Credit hours 3.000 Lecture hours Grade Basis: ALP Sch/Chemical&Biomolecular Engr Department Restrictions: May not be enrolled in one of the following Levels: Undergraduate Semester Must be enrolled in one of the following Campuses: Georgia Tech-Atlanta * |
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